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3-dimensional process simulation
紀錄類型:
書目-語言資料,印刷品 : 單行本
合作者:
LorenzJ,
出版地:
New York
出版者:
Springer-Verlag;
出版年:
c1995
面頁冊數:
196 p.ill. : 25 cm.;
標題:
Process control|xComputer simulation -
ISBN:
3-211-82741-2
3-dimensional process simulation
3-dimensional process simulation
/ J. Lorenz (ed.) - New York : Springer-Verlag, c1995. - 196 p. ; ill. ; 25 cm..
'This volume contains the Proceedings of the International'Workshop on 3D Process Simulation' which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on 'Simulation of Semiconductor Devices and Processes' (SISDEP '95)'--P. v.
ISBN 3-211-82741-2
Process control|xComputer simulation
Lorenz, J
3-dimensional process simulation
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1995
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